Vacuum Inline RF Ibikoresho bya Plasma

Vacuum Inline RF plasma Ibikoresho nigice cyihariye cyibikoresho byateguwe mugusukura no gukora ibikorwa byubuyobozi bwumuzingo byacapwe, cyane cyane kubikorwa bya IC substrate. Ikoreshwa cyane cyane nyuma yicyuma cyerekana amashusho yumye hanyuma ugashyiraho - igurisha mask yo kugurisha, aho gutegura neza kubutaka ningirakamaro mugutezimbere imbaraga zifatika no kwemeza kwizerwa mugihe gikurikiraho. Mugukoresha uburyo bwo kuvura plasma imbere mucyumba cyagenzuwe na vacuum, sisitemu ikuraho neza ibisigazwa kama n’ibihumanya hejuru, bikazamura imikorere rusange hamwe nubuziranenge bwibicuruzwa.

Ikintu cyihariye cyibi bikoresho nuburyo bubiri - ibyumba byubaka. Buri cyumba gifite ubwigenge gifite pompe vacuum na generator ya plasma ya RF, bigafasha gukora kimwe cyangwa gukoresha ubundi buryo. Ibi ntabwo bizamura ibicuruzwa gusa ahubwo binatanga imikorere ihinduka. Kugirango ugumane igihe kirekire - igihe gihamye, sisitemu ihuza - gufunga module ikonje itanga ubushyuhe bukora kuri pompe nisoko ya plasma. Kumirongo yumusaruro isaba kwikora, uburyo bwo gupakira no gupakurura kubushake burashobora kongerwaho kugirango hagabanuke imikoreshereze yintoki kandi byorohereze guhuza hamwe nibikoresho byo hejuru no kumanuka.

Ibintu bitembera muri sisitemu byateguwe neza. Ikibaho gishyikirizwa sitasiyo yinjizwamo kandi kigashyirwa mu bikorwa na robotic grippers, hanyuma igashyira substrate muri sub - ikadiri. Gushyigikirwa na platifomu hamwe na moteri ikoreshwa, imbaho ​​zishyikirizwa icyumba cya vacuum kugirango zivurwe plasma. Iyo gutunganya birangiye, umuzingo umwe wimura imbaho ​​hanze yicyumba, aho abifata bongeye kubatwara bakabishyikiriza icyiciro gikurikira. Sub - ikadiri ihita izunguruka hagati ya sitasiyo, ikemeza ko akazi kagenda neza kandi neza nta gihe cyo gukenera bitari ngombwa.